Isolast® PureFab®
The extensive PureFab® range of perfluorocarbon rubber (FFKM) materials deliver excellent performance in aggressive semiconductor processes, including deposition, etch, ash/strip, plasma cleaning, and thermal processing. 
The portfolio offers high-temperature stability, exceptional purity, ultra-low trace metal content, and outstanding plasma resistance.
Bonded Slit Valve Door Seals
Bonded slit valve door seals deliver significantly higher performance compared to conventional O-Ring door seals. They offer a longer service life and far more reliable sealing performance. Thanks to their extremely low particle generation and exceptional durability, costly downtime and maintenance intervals are greatly reduced.
Turcon® Variseal® NW
The Turcon® case of the flange seal incorporates an energizing spring that prevents any contact between the spring or spring cavity and the system media. It is ideal for use in semiconductor applications and has been proven effective in fluorine gas and vacuum environments.
Isolast® K-Fab™
The sealing element of the Isolast® K-Fab™ flange seal is made from a perfluoroelastomer (FFKM) specifically formulated for semiconductor applications. It offers excellent resistance to extreme temperatures and the complex chemistries found in critical subfab environments. 
Varilip® PDR®
Constructed from one or more Turcon® polytetrafluoroethylene-based sealing elements, mechanically retained within a precision-machined metal body, Turcon® Varilip® PDR rotary shaft seals ensure reliable dynamic sealing at high rotational speeds.  
 
Please contact: 
Trelleborg Sealing Solutions
E-Mail: tss.semiconductor@trelleborg.com

For more information about the tradeshow, please go to: https://www.semiconeuropa.org/